Microsystems Mechanical Design

Microsystems Mechanical Design

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This book introduces the basic tools used in the mechanical design of microsystems, the fabrication methods for these systems, and several applications of this technology. The links between micro- and nanotechnologies are also discussed and light is shed on the potential applications of microsystems to nano-scale manipulation of matter. The book is a systematic, updated and quite complete treatise of its subject.Pauli, W. (2000) Electrodynamics a€“ Pauli Lectures on Physics, vol.1, Dover. Rizzoni, G. (2000) Principles and applications of electrical engineering, 3rd Edition, McGraw Hill, Int.Edition. Inman, D. (2001) Engineering vibration, Prentice Hall.


Title:Microsystems Mechanical Design
Author: Francesco De Bona, Eniko T. Enikov
Publisher:Springer Science & Business Media - 2007-03-23
ISBN-13:

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